DESCRIPTION

· The FS1012 MEMS mass flow sensor module measures flow rate using the thermo-transfer (calorimetric) principle.

· It is capable of measuring gas or liquid mediums.

· The sensor utilizes thermopile sensing for an excellent signal-to-noise ratio.

· Features "solid" thermal isolation technology and silicon-carbide coating for robustness and long-term reliability.

· The sensor is fully assembled and wire-bonded to a 6-pin header.

· Wetted materials include glass fiber reinforced PA66 resin, epoxy, and silicon carbide.

FEATURES

· Suitable for gas or liquid mediums.

· Robust "solid" isolation technology.

· Resistant to surface contamination and clogging.

· Resistant to vibration and pressure shock.

· Low power application.

· Sensitive at low flow rates and differential pressure levels.

· Fast response: <5ms.

· Millivolt output.

· Supply voltage: 3V to 5V.

· Operating temperature range: 0°C to +85°C.

APPLICATIONS

· Process controls and monitoring.

· Oil and gas leak detection.

· HVAC and air control systems.

· CPAP and respiratory devices.

· Liquid dispensing systems.